Canon Launches New FPA-6300ES6a KrF DUV Scanner For High-Volume Production Of Memory, Logic And Image-Processing Devices
LAKE SUCCESS, N.Y., June 11, 2012 – Canon U.S.A., Inc., a leader in digital imaging solutions, recently announced that it has commenced sales of the new FPA-6300ES6a Deep Ultra-Violet (DUV) scanner, a lithography tool employing a KrF excimer laser*1 light source for the high-volume production of memory, logic and image-processing devices.
Amid an increasing demand for computers, smartphones and other advanced electronic devices, demand for the semiconductors used in the production of these products has continually increased, creating the need for tools capable of delivering high productivity, precision, reliability and capacity utilization. In response to these industry needs, Canon launched the new FPA-6300ES6a, designed for the mass production of Dynamic Random Access Memory (DRAM), flash and other memory devices; logic devices such as microprocessors for personal computers; color filters and other imaging sensors and image-processing devices.
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